Patent Assignment
Reel/Frame 058531/0983
Assignment of Assignor's Interest
Recorded: 2022-01-04
Pages: 7
Assignors
FISCHER, THOMAS
Executed: 2021-11-16
WISCHMEIER, LARS
Executed: 2021-11-13
PATRA, MICHAEL
Executed: 2021-11-29
HOLDERER, HUBERT
Executed: 2021-11-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Measurement Illumination Optical Unit for Guiding Illumination Light into an Object Field of a Projection Exposure System for Euv Lithography