Patent Assignment
Reel/Frame 058531/0990
Assignment of Assignor's Interest
Recorded: 2022-01-04
Pages: 5
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Wafer-Tilt Determination for Slice-and-Image Process
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.