Patent Assignment
Reel/Frame 058564/0068
Assignment of Assignor's Interest
Recorded: 2021-12-22
Pages: 3
Assignor
HUISMAN, SIMON REINALD
Executed: 2019-03-04
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Detection System for an Alignment Sensor