Patent Assignment
Reel/Frame 058589/0535
Assignment of Assignor's Interest
Recorded: 2022-01-10
Pages: 3
Assignor
CLARK, ROBERT
Executed: 2021-11-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
EUV Active Films for EUV Lithography