Patent Assignment
Reel/Frame 058620/0693
Assignment of Assignor's Interest
Recorded: 2022-01-11
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transport Apparatus, Substrate Transport Method, and Substrate Processing System