Patent Assignment
Reel/Frame 058634/0088
Assignment of Assignor's Interest
Recorded: 2022-01-12
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus, Substrate Transfer Method, and Substrate Processing System