Patent Assignment
Reel/Frame 058645/0989
Assignment of Assignor's Interest
Recorded: 2022-01-13
Pages: 3
Assignors
WOODS, KEENAN N.
Executed: 2020-09-15
CUI, ZHENJIANG
Executed: 2020-08-31
SALY, MARK
Executed: 2020-08-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Etching of Metal Oxides Using Fluorine and Metal Halides