Patent Assignment
Reel/Frame 058647/0133
Assignment of Assignor's Interest
Recorded: 2022-01-13
Pages: 8
Assignors
YAMAGATA, MOTOI
Executed: 2022-01-05
SONE, HIROSHI
Executed: 2022-01-05
SHINADA, MASATO
Executed: 2022-01-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Mounting Table Structure, Substrate Processing Apparatus, and Method of Controlling Substrate Processing Apparatus