Patent Assignment
Reel/Frame 058650/0309
Assignment of Assignor's Interest
Recorded: 2021-12-30
Pages: 2
Assignors
NOH, SANG EUN
Executed: 2021-12-29
EUM, KI SANG
Executed: 2021-12-29
OH, CHANG SUK
Executed: 2021-12-29
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Nozzle Standby Port, Apparatus for Treating Substrate Including the Same and Method for Cleaning Nozzle Using the Same