Patent Assignment
Reel/Frame 058674/0021
Assignment of Assignor's Interest
Recorded: 2022-01-17
Pages: 2
Assignor
MA, SHIH-YUAN
Executed: 2021-12-29
Assignee
NANYA TECHNOLOGY CORPORATION
NO.98, NANLIN RD., TAISHAN DIST., NEW TAIPEI CITY, 243, TAIWAN
Covered Property
(1)
Method for Overlay Error Correction and Method for Manufacturing a Semiconductor Device Structure with Overlay Marks