Patent Assignment
Reel/Frame 058674/0988
Assignment of Assignor's Interest
Recorded: 2022-01-18
Pages: 11
Assignors
RUOFF, JOHANNES
Executed: 2021-07-16
FELDMANN, HEIKO
Executed: 2021-07-10
MATEJKA, ULRICH
Executed: 2021-07-11
THALER, THOMAS
Executed: 2021-07-10
PERLITZ, SASCHA
Executed: 2021-12-15
WEI, SHAO-CHI
Executed: 2021-07-15
BLUMRICH, JOERG FREDERIK
Executed: 2021-07-09
DEGUENTHER, MARKUS
Executed: 2021-07-07
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Apparatus and Method for Characterizing a Microlithographic Mask