Patent Assignment
Reel/Frame 058681/0386
Assignment of Assignor's Interest
Recorded: 2022-01-18
Pages: 4
Assignors
CHAO, TZU-ANG
Executed: 2021-11-18
CHENG, CHAO-CHING
Executed: 2021-11-18
WANG, HAN
Executed: 2021-11-18
LI, MING-YANG
Executed: 2021-11-21
PITNER, GREGORY MICHAEL
Executed: 2021-11-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Pellicle for an Euv Lithography Mask and a Method of Manufacturing Thereof