Patent Assignment
Reel/Frame 058714/0214
Assignment of Assignor's Interest
Recorded: 2022-01-20
Pages: 3
Assignors
MEIJER, GERHARD INGMAR
Executed: 2022-01-17
WEBER, VALERY
Executed: 2022-01-17
STAAR, PETER WILLEM JAN
Executed: 2022-01-13
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Photoacid Generator for Chemically Amplified Photoresists for Deep Ultraviolet and Extreme Ultraviolet Lithography