Assignment of Assignor's Interest

Recorded: 2022-01-21 Pages: 14

Assignors

TSUBOTA, YASUTOSHI

Executed: 2022-01-17

YASUI, TAKESHI

Executed: 2022-01-17

INADA, TETSUAKI

Executed: 2022-01-17

Assignee

KOKUSAI ELECTRIC CORPORATION

3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Susceptor Cover, Method of Manufacturing Semiconductor Device and Substrate Processing Method

Application: 17/580,793 →

Publication: US 2022/0139760