Patent Assignment
Reel/Frame 058739/0337
Assignment of Assignor's Interest
Recorded: 2022-01-24
Pages: 13
Assignors
MOTOYAMA, YUTAKA
Executed: 2022-01-19
TAKAGI, SATOSHI
Executed: 2022-01-17
MATSUNAGA, AKARI
Executed: 2022-01-18
FUJITA, KEISUKE
Executed: 2022-01-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device and Substrate Processing Apparatus