Patent Assignment
Reel/Frame 058768/0798
Assignment of Assignor's Interest
Recorded: 2022-01-19
Pages: 27
Assignors
UEDA, HIROKAZU
Executed: 2022-01-05
YUASA, HIDEKI
Executed: 2022-01-05
FUJINO, YUTAKA
Executed: 2022-01-06
KONDO, YOSHIYUKI
Executed: 2022-01-05
IKUTA, HIROYUKI
Executed: 2022-01-05
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus