Patent Assignment
Reel/Frame 058775/0035
Assignment of Assignor's Interest
Recorded: 2022-01-26
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems For Etching A Substrate Using A Hybrid Wet Atomic Layer Etching Process