Patent Assignment
Reel/Frame 058814/0553
Assignment of Assignor's Interest
Recorded: 2022-01-28
Pages: 3
Assignor
CHEN, YEN-LIANG
Executed: 2022-01-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Structure for Overlay Measurement in Semiconductor Device Manufacturing