Patent Assignment
Reel/Frame 058821/0330
Change of Name
Recorded: 2022-01-24
Pages: 3
Assignor
KLA-TENCOR CORPORATION
Executed: 2019-06-19
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Pumping Laser Sustained Plasma with an Illumination Source Having Modified Pupil Power Distribution
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.