Patent Assignment
Reel/Frame 058836/0722
Assignment of Assignor's Interest
Recorded: 2022-01-31
Pages: 3
Assignor
MAEDA, KOJI
Executed: 2022-01-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Processing Method