IP Library › Assignment 058841/0824
Patent Assignment
Reel/Frame 058841/0824

Assignment of Assignor's Interest

Recorded: 2022-02-01 Pages: 3
Assignors
ZHANG, QI
Executed: 2020-08-19
YANG, HAICHUN
Executed: 2020-08-19
CHUNG, HUA
Executed: 2020-08-19
YANG, MICHAEL X.
Executed: 2020-08-19
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property (1)
Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
Application: 17/326,945 →
Publication: US 2021/0366727
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Feb 1, 2022
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 058841/0964 →