Patent Assignment
Reel/Frame 058841/0964
Assignment of Assignor's Interest
Recorded: 2022-02-01
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.