Patent Assignment
Reel/Frame 058844/0974
Assignment of Assignor's Interest
Recorded: 2022-02-01
Pages: 4
Assignor
MIZOMOTO, YASUTAKA
Executed: 2022-01-25
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus