Patent Assignment
Reel/Frame 058862/0668
Assignment of Assignor's Interest
Recorded: 2022-02-02
Pages: 5
Assignors
SOHN, MANUEL
Executed: 2021-01-26
BREMENSDORFER, ROLF
Executed: 2020-08-31
HAMM, SILKE
Executed: 2020-09-15
HEZLER, DIETER
Executed: 2020-08-30
Assignee
MATTSON THERMAL PRODUCTS, GMBH.
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Rapid Thermal Processing System With Cooling System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 2, 2022
From: MATTSON THERMAL PRODUCTS, GMBH.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 058862/0700 →
Assignment of Assignor's Interest
Feb 2, 2022
From: MATTSON TECHNOLOGY, INC.
To: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD; MATTSON TECHNOLOGY, INC.
Reel/Frame 058862/0734 →