Patent Assignment
Reel/Frame 058873/0713
Assignment of Assignor's Interest
Recorded: 2022-02-03
Pages: 9
Assignors
BEZEL, ILYA
Executed: 2021-05-17
ZVEDENUK, LEONID BORISOVICH
Executed: 2021-05-19
STEPANOV, ANDREY EVGENIEVICH
Executed: 2022-01-20
DEMINSKII, MAKSIM ALEXANDROVICH
Executed: 2021-10-08
POTAPKIN, BORIS VASILYEVICH
Executed: 2021-06-10
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Rotating Lamp for Laser-Sustained Plasma Illumination Source