Patent Assignment
Reel/Frame 058877/0374
Assignment of Assignor's Interest
Recorded: 2022-02-03
Pages: 4
Assignor
CHEN, YEN-LIANG
Executed: 2017-09-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Overlay Measurement Structures Having Overlapping Patterns
Application:
17/591,891 →
Publication:
US 2022/0155696