Patent Assignment
Reel/Frame 058885/0607
Assignment of Assignor's Interest
Recorded: 2022-02-04
Pages: 14
Assignors
FUKUI, SHOGO
Executed: 2022-01-27
GOSHO, MASATAKA
Executed: 2022-01-20
OKAMURA, SATOSHI
Executed: 2022-01-25
URA, TOMOHITO
Executed: 2022-01-25
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method