Patent Assignment
Reel/Frame 058928/0298
Assignment of Assignor's Interest
Recorded: 2022-02-08
Pages: 14
Assignors
XIE, TING
Executed: 2020-08-28
LI, HAOCHEN
Executed: 2020-08-28
MENG, SHUANG
Executed: 2020-08-28
ZHANG, QIQUN
Executed: 2021-01-19
KOHL, DAVE
Executed: 2020-08-28
MA, SHAWMING
Executed: 2020-08-28
YANG, HAICHUN
Executed: 2020-08-28
CHUNG, HUA
Executed: 2020-08-28
PAKULSKI, RYAN
Executed: 1999-11-08
YANG, MICHAEL X.
Executed: 2020-08-28
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods And Apparatus For Pulsed Inductively Coupled Plasma For Surface Treatment Processing
Application:
17/245,803 →
Publication:
US 2021/0343506
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.