Patent Assignment
Reel/Frame 058928/0321
Assignment of Assignor's Interest
Recorded: 2022-02-08
Pages: 6
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, BEIJING, 100176, CHINA
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods And Apparatus For Pulsed Inductively Coupled Plasma For Surface Treatment Processing
Application:
17/245,803 →
Publication:
US 2021/0343506
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.