Patent Assignment
Reel/Frame 059022/0486
Assignment of Assignor's Interest
Recorded: 2022-02-16
Pages: 7
Assignors
LUNA, JENNIFER BUGAYONG
Executed: 2021-12-17
ATHALYE, ATUL M.
Executed: 2021-06-10
MA, CE
Executed: 2021-06-10
SINHA, ASHWINI K.
Executed: 2022-02-07
Assignee
PRAXAIR TECHNOLOGY, INC.
10 RIVERVIEW DR., DANBURY, CONNECTICUT, 06810
Covered Property
(1)
Method for Pretreating and Recovering a Rare Gas from a Gas Contaminant Stream Exiting an Etch Chamber