Patent Assignment
Reel/Frame 059039/0834
Assignment of Assignor's Interest
Recorded: 2022-02-17
Pages: 3
Assignor
ABEL, PAUL
Executed: 2022-02-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods For Wet Atomic Layer Etching Of Ruthenium