Patent Assignment
Reel/Frame 059063/0803
Assignment of Assignor's Interest
Recorded: 2022-02-22
Pages: 5
Assignors
CHANG, CHENG-WEI
Executed: 2020-04-21
HUANG, YU-MING
Executed: 2020-04-20
TSENG, ETHAN
Executed: 2020-04-20
CHANG, KEN-YU
Executed: 2020-04-20
LIU, YI-YING
Executed: 2020-04-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Source/Drain Contact Formation Methods and Devices