Patent Assignment
Reel/Frame 059065/0255
Assignment of Assignor's Interest
Recorded: 2022-02-22
Pages: 4
Assignors
LEE, MING-TSUNG
Executed: 2022-02-09
PAN, YI-WEN
Executed: 2022-02-09
LU, TZU-NUNG
Executed: 2022-02-21
LI, YOU-LAN
Executed: 2022-02-07
KO, CHUNG-CHI
Executed: 2022-02-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Forming Dielectric Film With High Resistance to Tilting
Application:
17/651,990 →
Publication:
US 2023/0154852