Patent Assignment
Reel/Frame 059127/0928
Assignment of Assignor's Interest
Recorded: 2022-03-01
Pages: 3
Assignors
LIU, JINGJING
Executed: 2019-09-04
HSU, DUAN-FU STEPHEN
Executed: 2019-09-04
PENG, XINGYUE
Executed: 2019-09-04
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Determining Aberration Sensitivity of Patterns