Patent Assignment
Reel/Frame 059142/0928
Assignment of Assignor's Interest
Recorded: 2022-03-02
Pages: 8
Assignors
CUTLER, CHARLOTTE
Executed: 2022-02-28
MURPHY, MICHAEL
Executed: 2022-03-01
SCHEPIS, ANTHONY R.
Executed: 2022-02-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Adjusting Wafer Shape Using Multi-Directional Actuation Films