Patent Assignment
Reel/Frame 059151/0873
Assignment of Assignor's Interest
Recorded: 2022-03-02
Pages: 4
Assignors
KAPOOR, SUNIL
Executed: 2020-02-11
LEESER, KARL FREDERICK
Executed: 2020-03-25
BAKER, NOAH
Executed: 2020-02-11
MENG, LIANG
Executed: 2020-02-17
SAKIYAMA, YUKINORI
Executed: 2020-02-12
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Anomalous Plasma Event Detection and Mitigation in Semiconductor Processing