Patent Assignment
Reel/Frame 059158/0260
Assignment of Assignor's Interest
Recorded: 2022-03-03
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Mechanism and Substrate Transferring Method