Patent Assignment
Reel/Frame 059209/0937
Assignment of Assignor's Interest
Recorded: 2022-03-09
Pages: 8
Assignors
OKABE, TSUNEYUKI
Executed: 2022-02-14
OKURA, SHIGEYUKI
Executed: 2022-02-18
KOMORI, EIICHI
Executed: 2022-02-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Raw Material Gas Supply System and Raw Material Gas Supply Method