Patent Assignment
Reel/Frame 059260/0193
Assignment of Assignor's Interest
Recorded: 2022-03-14
Pages: 4
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Apparatus for Diffraction-Based Overlay Measurement