Patent Assignment
Reel/Frame 059265/0163
Assignment of Assignor's Interest
Recorded: 2022-03-15
Pages: 4
Assignors
WU, REN-HAU
Executed: 2022-03-13
HU, CHANG-KANG
Executed: 2022-03-13
SHIU, YI-FAM
Executed: 2022-03-13
WU, CHENG-LUNG
Executed: 2022-03-13
LIU, HSU-SHUI
Executed: 2022-03-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Humidity Control Device for Equipment Front End Module of Semiconductor Processing or Characterization Tool