Patent Assignment
Reel/Frame 059276/0738
Assignment of Assignor's Interest
Recorded: 2022-03-16
Pages: 5
Assignors
COLVIN, NEIL K.
Executed: 2021-10-29
BASSOM, NEIL
Executed: 2021-10-29
MOORE, EDWARD
Executed: 2022-02-16
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Fluorine Based Molecular Co-Gas When Running Dimethylaluminum Chloride as a Source Material to Generate an Aluminum Ion Beam