Patent Assignment
Reel/Frame 059305/0200
Assignment of Assignor's Interest
Recorded: 2022-03-18
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Method for Forming Insulating Film, Apparatus for Processing Substrate, and System for Processing Substrate