Patent Assignment
Reel/Frame 059321/0482
Assignment of Assignor's Interest
Recorded: 2022-03-04
Pages: 2
Assignors
PEI, JIANGTAO
Executed: 2021-11-05
LIAN, ZENGDI
Executed: 2021-11-05
ZUO, RASON
Executed: 2021-11-05
WU, DEE
Executed: 2021-11-05
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Bottom Electrode Assembly, Plasma Processing Apparatus, and Method of Replacing Focus Ring