Patent Assignment
Reel/Frame 059370/0736
Assignment of Assignor's Interest
Recorded: 2022-03-23
Pages: 2
Assignor
MATSUURA, SHIN
Executed: 2022-03-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME,, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System and Method of Mounting Annular Member