Patent Assignment
Reel/Frame 059371/0669
Assignment of Assignor's Interest
Recorded: 2022-03-23
Pages: 3
Assignor
SADEGHI, HOSSEIN
Executed: 2020-10-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Autonomous Process Control and Optimization of Semiconductor Equipment Using Light Interferometry and Reflectometry