Patent Assignment
Reel/Frame 059372/0279
Assignment of Assignor's Interest
Recorded: 2022-03-23
Pages: 8
Assignors
HOFKENS, JOHAN
Executed: 2022-02-08
YUAN, HAIFENG
Executed: 2022-02-08
DE JONG, FLIP
Executed: 2022-02-07
Assignee
KATHOLIEKE UNIVERSITEIT LEUVEN
KU LEUVEN R&D, WAAISTRAAT 6-BOX 5105, LEUVEN, 3000, BELGIUM
Covered Property
(1)
Photoresist Inspection Apparatus, Photoresist Inspection Method Using the Same, and Electron Beam Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.