Patent Assignment
Reel/Frame 059389/0104
Assignment of Assignor's Interest
Recorded: 2022-03-24
Pages: 12
Assignors
TSUCHIGUCHI, DAIHI
Executed: 2022-01-28
YOSHIDA, TOSHIHIDE
Executed: 2022-01-25
TANNO, RYUTARO
Executed: 2022-01-26
SUZUKI, YUYA
Executed: 2022-03-23
KONDO, KENTA
Executed: 2022-01-28
NAKATA, TOMOHIRO
Executed: 2022-01-28
SHINOHARA, TSUTOMU
Executed: 2022-01-28
TAKIMOTO, MASAHIKO
Executed: 2022-01-25
Assignee
FUJIKIN INCORPORATED
3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-CITY, OSAKA, 5500012, JAPAN
Covered Property
(1)
Valve Device, Flow Rate Control Method, Fluid Control Device, Semiconductor Manufacturing Method, and Semiconductor Manufacturing Apparatus Using the Valve Device