Patent Assignment
Reel/Frame 059399/0691
Assignment of Assignor's Interest
Recorded: 2022-03-25
Pages: 3
Assignor
TAPILY, KANDABARA
Executed: 2022-03-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Atomic Layer Deposition of Aluminum Oxide Films for Semiconductor Devices Using an Aluminum Alkoxide Oxidizer