Patent Assignment
Reel/Frame 059406/0238
Assignment of Assignor's Interest
Recorded: 2022-03-26
Pages: 3
Assignor
CHEN, TING-JUNG
Executed: 2022-03-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Curved Cantilever Design to Reduce Stress in Mems Actuator