Patent Assignment
Reel/Frame 059440/0156
Assignment of Assignor's Interest
Recorded: 2022-03-30
Pages: 6
Assignors
LEE, UIHYOUNG
Executed: 2022-03-17
GIM, SUJI
Executed: 2022-03-16
PARK, HONGSIK
Executed: 2022-03-15
LEE, TAEHEON
Executed: 2022-03-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus Trapping an Exhaust Material from a Substrate-Processing Process and Apparatus for Processing a Substrate Including the Trapping Apparatus